An innovative solution for the disposal of liquid waste from cutting silicon wafers
The problem of recycling liquid waste from cutting silicon wafers
Disposal of liquid waste from the semiconductor industry generated by cutting silicon wafers
Silicon is one of the most important elements currently used in the semiconductor industry. Due to its chemical, electrical, and mechanical properties, silicon is an ideal material for making a substrate for subsequent growth of other materials on it.
- The intensive growth of the semiconductor industry requires not only an in-depth study of the properties of silicon and its processing processes, but also methodologies for processing toxic waste generated along the way.
- Laser cutting of silicon wafers is accompanied by the formation of a significant volume of liquid waste, the problem of which purification cannot be solved within the framework of industrial wastewater treatment.
- Specialists of the chemical technology department of Eco-Spectrum calculated the composition of waste based on the results of studying the customer's production processes.
Engineering tasks
Developing its technological potential, Eco-Spectrum has developed an integrated approach to solving the problem of recycling liquid waste from the semiconductor industry resulting from cutting silicon wafers.
- Testing of the feed system and the automatic adjustable feed of liquid propellant into the processing plant;
- A selection of the technological, including temperature, operating mode of the HURIKAN C experimental installation;
- Investigation of the mass and composition of the resulting ash residue;
- Instrumental measurements and studies of volume and the quality of flue gases for the selection of an effective system of gas cleaning equipment.
Product results
The optimal and universal solution to the problems of recycling liquid waste from the semiconductor industry resulting from cutting silicon wafers with various component compositions was the adaptation of cyclone incinerators of the HURIKAN 3000C type into the work processes of an industrial enterprise.
- A calculated analysis of the waste was performed, laboratory tests were carried out in order to determine the requirements for the GO and the list of reagents capable of ensuring the quality of the emission within the limits of technological parameters.
| Waste name | C, % | H, % | O, % | N, % | S, % | Cl, % | W, % | A, % | Q, kcal/kg |
|---|---|---|---|---|---|---|---|---|---|
| Sample 2 | 2,555 | 0,328 | 0,078 | 0,009 | 0,012 | 0 | 96,718 | 0,300 | -295 |
| Sample 3 | 21,022 | 4,839 | 1,119 | 0 | 21,639 | 0 | 47,500 | 3,881 | 2016 |
- During the tests, energy consumption, fuel consumption, electricity, reagents, etc. readings were taken. Operating modes were determined, the combustion rate was determined, the ash content, ash quality and hazard class were determined, and the cost of thermal waste disposal was calculated.
- Several types of heat exchange devices for heat recovery have been developed
Test results and search for solutions
Specialists of the chemical technology department of Eco-Spectrum calculated the composition of waste: purified household, industrial rainwater, meltwater, wastewater from washing and steaming of technological equipment, industrial wastewater (10% solution of bleach/calcium hypochlorite, odorant, etc. based on the results of studying the customer's production processes.
The result of the tests is confirmation of the possibility of reducing the hazard class from III to IV, V, reduction in volume, the possibility of obtaining heat (BMP) from thermal disposal of the problems of disposal of liquid waste from the semiconductor industry formed as a result of cutting silicon wafers.
The data obtained from an independent accredited laboratory was used to substantiate the applicability of the gas purification system, its composition, and the required reagents to bring concentrations of pollutants to the norm in accordance with the requirements of environmental legislation.
Kremlev Denis Sergeevich
SALES DEPARTMENT ENGINEER
d.kremlev@ecospectrum.ru
8-800-555-59-12 (ext. number 121)
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